DCM-40/60

Double View Microscope (applicable to wafers up to 4 and 6 inches in diameter)

DCM-40/60 are unique microscope systems superimposing top and bottom patterns of specimen (wafer) in the view field of microscope, then comparing shift to measure the shift length by measuring system. Since the objective lenses installed at top and bottom are 5 types, ranging from 50X to 1000X in total magnification, various specimens can be observed.
DCM-60DCM-40
Objectives
(To be selected
by customer)
(Total Magnification) (50X) (100X) (200X) (400X)
Top PLM5X PLM10X PLLWDM20X PLLWDM40X
Bottom PLM5X PLM10X PLLWDM20X PLLWDM40X
EyepieceA pair of SUW10X
(including Micrometer Reticle)
A pair of UW10X
(including Micrometer Reticle)
Total Magnification50X to 400X (Larger Magnifications are available on custom-order basis.)
Travel Distance of Upper Objective24mm30mm
Travel Distance of Lower Objective3mm12mm
FilterTop:Green / Bottom:Red
Stage & Counter150 x 150mm Manual Stage
KC-12R Counter (1μm reading)
50 x 50mm Manual Stage, Digital Micrometer (1μm reading) 100 x 100mm Manual Stage, KC-12R Counter (1μm reading)
Stage TravelX : 150mm Y : 150mmX : 50mm Y : 50mm
X : 100mm Y : 100mm
Wafer HolderMaximum : 6 inchesMaximum : 4 inches
Holder can be supplied in specially designed shape on custom-order basis.
Stage Rotation360°
Illumination150W Halogen Light Guide Illumination
Thickness of Material20mm or less30mm or less
Type of Calibration ChartCalibration Chart for Optical Axis Alignment
Download PDF leaflet  DCM-40/60
月光影院完整电影